Analysis and Design Principles of MEMS Devices by Minhang Bao PDF

By Minhang Bao

ISBN-10: 0444516166

ISBN-13: 9780444516169

ISBN-10: 1493302310

ISBN-13: 9781493302314

Sensors and actuators at the moment are a part of our way of life and seem in lots of home equipment, corresponding to autos, merchandising machines and washing machines. MEMS (Micro Electro Mechanical platforms) are micro platforms along with micro mechanical sensors, actuators and micro digital circuits. numerous MEMS units were built and plenty of mass produced, however the info on those is generally dispersed within the literature. This publication provides the research and layout rules of MEMS units. the data is accomplished, concentrating on microdynamics, resembling the mechanics of beam and diaphragm constructions, air damping and its impact at the movement of mechanical constructions. utilizing useful examples, the writer examines difficulties linked to research and layout, and options are incorporated behind the ebook. the best complex point textbook for graduates, Analysis and layout ideas of MEMS Devices is an acceptable resource of reference for researchers and engineers within the field.

* provides the research and layout ideas of MEMS units extra systematically than ever before.

* comprises the theories crucial for the research and layout of MEMS contains the dynamics of micro mechanical structures

* an issue part is integrated on the finish of every bankruptcy with solutions supplied on the finish of the book.

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Analysis and Design Principles of MEMS Devices by Minhang Bao


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